# Integrated Modeling of Chemical Mechanical Planarization for

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I've also seen suggestions to rub with alcohol, which I think is a mild solvent for a lot of surface finishes, but if you use too much or rub too hard, you'll remove too much of the finish and that area will become a different color (especially if the finish is old and it's become darker). We can estimate the brightness of the first side fringe by substituting its approximate position $$\alpha = 3\pi/2$$ into Eq. \eqref{eqn_5}: \begin{eqnarray} I \textrm{(first side fringe)} / I_0 &=& 1/(3\pi/2)^2 = 0.045. \label{eqn_9} \end{eqnarray} The first side fringe is only 4.5% as bright as the central maximum.

Pages: 311

Publisher: Springer; Softcover reprint of hardcover 1st ed. 2004 edition (February 19, 2010)

ISBN: 364206115X

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# Download Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales pdf

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